Enhancing High Bandwidth Memory (HBM) Reliability With 3D X-ray Inspection


High Bandwidth Memory (HBM) is revolutionizing AI, high-performance computing, and advanced graphics systems. Its 3D architecture—stacked DRAM dies interconnected via through-silicon vias (TSVs)—delivers exceptional bandwidth and efficiency. But this complexity introduces new challenges for inspection and quality assurance. Why 3D X-ray for HBM? Traditional 2D X-ray imaging cannot fully v... » read more

Catching Critical Defects In TSVs And Stacked Chips


Key Takeaways Variation is becoming a bigger problem in multi-die assemblies with TSVs and hybrid bonding. Multi-modal approaches are required to test these devices. AI plays a role in improving defect capture rate and distinguishing between yield-killing and false positives. New methods for interconnecting devices using through-silicon vias (TSVs) and hybrid bonding in stac... » read more

Metrology Digs Deep To Produce Next-Generation 3D NAND


Each generation of 3D NAND packs about 30% more bits than the previous version, with current devices storing up to 2 terabits of data in a die the size of a fingernail. With new product introductions shrinking from 18 months to every 12 months, chipmakers are constantly innovating to enable this prodigious scaling pace. 3D NAND technology is a core ingredient in mobile phones, solid-state dr... » read more

Overview Of Radiation Dose During X-ray Inspection Of Electronics


X-ray imaging of semiconductor and electronic devices is an invaluable tool; enabling non-invasive sub-surface inspection, identification of defects and measurement of critical dimensions. Figure 1 shows a schematic and description of a typical X-ray inspection system for electronics and semiconductor devices. Unfortunately, semiconductor devices are sensitive to sustained radiation dose, which... » read more

Metrology Under Pressure: Detecting Defects in Fine-Pitch Hybrid Bonding


As advanced packaging pushes deeper into the sub-10µm realm, traditional inspection and metrology systems are being forced to evolve with it. Hybrid bonding, a critical enabler of vertical integration and 3D system performance, relies on exceptionally tight alignment and defect-free bonding surfaces. But as interconnect pitch shrinks, even nanometer-scale variations in height, tilt, or cont... » read more

Challenges In Using Sub-7nm ICs In Automotive


The automotive industry is producing vehicles with increasing levels of real-time decision-making, enabled by thousands of ICs, sensors, and multi-chip packages, but making sure these systems work flawlessly throughout their expected lifetimes is a growing challenge. Automotive chips traditionally were developed at mature process nodes in five- to seven-year cycles, but much has changed over... » read more

E-Beam Inspection Proves Essential For Advanced Nodes


Electron-beam inspection is proving to be indispensable for finding critical defects at sub-5nm dimensions. The challenge now is how to speed up the process to make it economically palatable to fabs. E-beam inspection's notorious sensitivity-throughput tradeoff has made comprehensive defect coverage with e-beam at these advanced nodes especially problematic. For Intel’s 18A logic node (~1.... » read more

Why Thin Film Measurements Matter


Semiconductor devices are becoming thinner and more complex, making thin deposited films even harder to measure and control. With 3nm node devices in production and 2nm nodes ramping toward first-silicon, the importance of precise film measurement is only growing in significance as fabs seek to maintain the performance and reliability of leading-edge devices. Whether it’s the read and writ... » read more

Nearly Invisible: Defect Detection Below 5nm


Detecting sub-5nm defects creates huge challenges for chipmakers, challenges that have a direct impact on yield, reliability, and profitability. In addition to being smaller and harder to detect, defects are often hidden beneath intricate device structures and packaging schemes. Moreover, traditional optical and electrical probing methods, trusted for decades, are proving inadequate against ... » read more

Need For KGD Drives Singulated Die Screening


The move to multi-die packaging is driving chipmakers to develop more cost-effective ways to ensure only known-good die are integrated into packages, because the price of failure is significantly higher than with a single die. Better methods for inspecting and testing these devices are already starting to roll out. High-throughput infrared inspection is capable of catching more sub-surface d... » read more

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