中文 English
Home
WHITEPAPERS

Fab Fingerprint For Proactive Yield Management

How to improve yield and fab productivity by implementing a frequent pattern database that utilizes artificial intelligence.

popularity

The following paper presents a case study describing how to improve yield and fab productivity by implementing a frequent pattern database that utilizes artificial intelligence-based spatial pattern recognition (SPR) and wafer process history. This is important because associating spatial yield issues with process and tools is often performed as a reactive analysis, resulting in increased wafer scrap or die loss that could be prevented. The implementation of fab fingerprint technology proactively generates a pareto of high impacting process steps and tools based on a pattern score, enabling the production team to concentrate more efficiently on yield limiting events.

from Advancing Semiconductor Manufacturing Conference (ASMC)

Click here to read more.



Leave a Reply


(Note: This name will be displayed publicly)