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EUV Pellicles Finally Ready


After a period of delays, EUV pellicles are emerging and becoming a requirement in high-volume production of critical chips. At the same time, the pellicle landscape for extreme ultraviolet (EUV) lithography is changing. ASML, the sole supplier of EUV pellicles, is transferring the assembly and distribution of these products to Mitsui. Others are also developing pellicles for EUV, a next-gen... » read more

The Future Of Transistors And IC Architectures


Semiconductor Engineering sat down to discuss chip scaling, transistors, new architectures, and packaging with Jerry Chen, head of global business development for manufacturing & industrials at Nvidia; David Fried, vice president of computational products at Lam Research; Mark Shirey, vice president of marketing and applications at KLA; and Aki Fujimura, CEO of D2S. What follows are excerpt... » read more

Cloud Vs. On-Premise Analytics


The immense and growing volume of data generated in chip manufacturing is forcing chipmakers to rethink where to process and store that data. For fabs and OSATs, this decision is not one to be taken lightly. The proprietary nature of yield, performance, and other data, and corporate policies to retain tight control of that data, have so far limited outsourcing to the cloud. But as the amount... » read more

Process Window Optimization Of DRAM By Virtual Fabrication


New integration and patterning schemes used in 3D memory and logic devices have created manufacturing and yield challenges. Industrial focus has shifted from the scaling of predictable unit processes in 2D structures to the more challenging full integration of complex 3D structures. Conventional 2D layout DRC, offline wafer metrology, and offline electrical measurements are no longer sufficient... » read more

Infrastructure Impacts Data Analytics


Semiconductor data analytics relies upon timely, error-free data from the manufacturing processes, but the IT infrastructure investment and engineering effort needed to deliver that data is, expensive, enormous, and still growing. The volume of data has ballooned at all points of data generation as equipment makers add more sensors into their tools, and as monitors are embedded into the chip... » read more

Adaptive Shot Technology To Address Severe Lithography Challenges For Advanced FOPLP


Fan-out wafer level packaging (FOWLP) is a popular new packaging technology that allows the user to increase I/O in a smaller IC size than fan-in wafer level packaging. Market drivers such as 5G, IoT, mobile and AI will all use this technology. According to Yole Développement’s analysis, the fan-out packaging market size will increase to $3 billion in 2022 from $2.44 hundred million in 2014,... » read more

Yield Enhancement Technology: Efforts To Suppress Nanosized Particles In Semiconductor Production Equipment


The currently dominant semiconductor process size is in the range between a few and a few dozen nanometers. That means if a nanosized particle smaller than a virus (hereinafter simply “particle”) is present on a silicon substrate, it could cause a defect in the semiconductor device, lowering the production yield (i.e., the percentage of good chips produced in a manufacturing process). Preve... » read more

Adaptive Test Gains Ground


Not all devices get tested the same way anymore, and that’s a good thing. Quality, test costs, and yield have motivated product engineers to adopt test processes that fall under the umbrella of adaptive test, which uses test data to modify a subsequent test process. But to execute such techniques requires logistics that support analysis of data, as well as enabling changes to a test based ... » read more

Virtual Fabrication At 7/5/3nm


David Fried, vice president of computational products at Lam Research, digs into virtual fabrication at the most advanced nodes, how to create models using immature processes at new nodes, and how to fuse together data from multiple different silos. » read more

Increase In Analog Problems


Analog and mixed signal design has always been tough, but a resent survey suggests that the industry has seen significantly increased failures in the past year because the analog circuitry within an ASIC was out of tolerance. What is causing this spike in failures? Is it just a glitch in the data, or are these problems real? The answer is complicated, and to a large extent it depends heavily... » read more

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