Large-Scale Nanometer-Thick Graphite Film (NGF) As A EUV Pellicle


A new technical paper titled “Graphite Pellicle: Physical Shield for Next-Generation EUV Lithography Technology” was published by researchers at University of Ottawa, Sungkyunkwan University, and Hanbat National University.


“Extreme ultraviolet lithography (EUVL) is widely employed in the electronics, automotive, military, and AI computing areas for IC chip fabrication. A pellicle is a thin and transparent membrane that protects a costly photomask, known as a reticle, during the EUVL process. The fabricated IC chip can be disastrous without a pellicle. When a particle lands on a photomask, it frequently results in a faulty pattern, which leads to chip failure and lower production yield. A nanometer-thick graphite (NGF) has demonstrated tremendous potential for addressing optical, mechanical, thermal, and chemical criteria among potential pellicle materials such as carbon allotropes, Si, SiNx, and Si-Mo-Nb. This review summarizes current progress in NGF pellicles, including large-scale material fabrication (up to 135 mm × 135 mm), transfer method for freestanding form, and practical characterization methods. Current significant challenges and future opportunities for NGF pellicles are also discussed in order to facilitate a critical transition from lab-scale research to industrial-scale implementation.”

Find the technical paper here. Published March 2023.

Choi, Hyung Woo, Ki‐Bong Nam, and Dong‐Wook Shin. “Graphite Pellicle: Physical Shield for Next‐Generation EUV Lithography Technology.” Advanced Materials Interfaces (2023): 2202489.

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