By David Lammers
With the industry facing challenges in the introduction of EUV lithography and high costs for double patterning, TSV introductions have taken on heightened importance, participants said at the SEMI Advanced Semiconductor Manufacturing Conference (ASMC), held in Saratoga Springs, N.Y. in mid-May.
Risto Puhakka, president of market research firm VLSI Research Inc., said the g...
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