Thin Film Characterization For Advanced Patterning


Authors: Zhimin Zhu; Xianggui Ye; Sean Simmons; Catherine Frank; Tim Limmer; James Lamb Brewer Science, Inc. (United States) A variable-angle spectroscopic ellipsometer (VASE) is an essential tool for measuring the thickness of a thin film, as well as its n and k optical parameters. However, for films thinner than 10 nm, precise measurement is very challenging. In this paper, the root cause... » read more

Ion Beam Sputtering Deposition of Fluoride Thin Films


By Aiko Ode, Veeco Instruments Thin film coatings for deep UV wavelengths are predominately produced by evaporation methods (thermal and Ebeam). Factors limiting the performance of evaporated films include surface roughness, porosity, absorption, and defect density. To enhance the films, they are typically deposited at high substrate temperatures (above 300°C.) The thermal stress created u... » read more

Non-Traditional Chips Gaining Steam


Flexible hybrid electronics are beginning to roll out in the form of medical devices, wearable electronics and even near-field communications tags in retail, setting the stage for a whole new wave of circuit design, manufacturing and packaging that reaches well beyond traditional chips. FHE devices begin with substrates made of ceramics, glass, plastic, polyimide, polymers, polysilicon, stai... » read more

Power/Performance Bits: May 23


Biosupercapacitor Researchers from UCLA and the University of Connecticut designed a biological supercapacitor, a new biofriendly energy storage system which operates using ions from fluids in the human body. The device is harmless to the body's biological systems, say the researchers, and could lead to longer-lasting cardiac pacemakers and other implantable medical devices. The supercapa... » read more