Why it’s necessary, when it’s coming, and what still needs to be done.
High-NA EUV will enable logic scaling for at least the next couple process nodes. It’s complex, expensive, and a feat of optical engineering, but there are a lot of components with mixed progress. Harry Levinson, principal lithographer at HJL Lithography, talks about when this technology will likely show up, what problems still need to be resolved, and what comes next.
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High-NA Lithography Starting To Take Shape
First systems built, with production planned for 2025; hyper-NA to follow next decade.
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