MEMS Capacitance Extraction With Calibre xACT-3D Software

How to meet performance and reliability expectations with minimal computational resources.


The growing use of MEM’s in today’s complex products requires new approaches to capacitance calculation to ensure companies can meet their time-to-market targets while producing products that meet performance and reliability expectations. Freescale Semiconductor and Mentor Graphics collaborated to demonstrate that Calibre xACT-3D software provides a robust method for extracting node-to-node capacitance values for MEMs devices with field-solver level accuracy, while requiring minimal computational resources.

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