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Novel E-Beam Techniques For Inspection And Monitoring

An advanced e-beam defect inspection tool allows for in-line inspection of nanometer-level defects in the most advanced technology nodes.

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In this paper, we report an advanced e-beam defect inspection tool (eProbe®250) and the Design-for-Inspection™ (DFI) system that has been built and deployed by PDF Solutions down to 4nm FinFET technology nodes. This tool has a very high throughput which allows for in-line inspection of nanometer-level defects in the most advanced technology nodes. We also present eProbe applications for detection of systematic buried defects and process window characterization.

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