Chip Industry Technical Paper Roundup: Sept. 3


New technical papers recently added to Semiconductor Engineering’s library: [table id=256 /] More ReadingTechnical Paper Library home » read more

Buried Si/SiGe Interfaces Investigated Using Soft X-Ray Reflectometry and STEM-EDX


A new technical paper titled "Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy" was published by researchers at Physikalisch-Technische Bundesanstalt (PTB), imec, and Thermo Fisher Scientific Inc. The paper states: "A key element of semiconductor fabrication is the precise deposition of thin films. Among other... » read more

Chip Industry Technical Paper Roundup: March 26


New technical papers recently added to Semiconductor Engineering’s library. [table id=209 /] Find last week's technical paper additions here. » read more

Quantum Computing: New Ion Trap On A Microfabricated Chip (ETH Zurich)


A new technical paper titled "Penning micro-trap for quantum computing" was published by researchers at ETH Zürich, Leibniz Universität Hannover, and Physikalisch-Technische Bundesanstalt. Abstract "Trapped ions in radio-frequency traps are among the leading approaches for realizing quantum computers, because of high-fidelity quantum gates and long coherence times. However, the use of r... » read more

Manufacturing Bits: Aug. 27


Holographic lithography Switzerland’s Nanotech SWHL GmbH has come out of stealth mode and disclosed its initial technology—a holographic lithography system. Founded in 2015, Nanotech SWHL has developed a sub-wavelength holographic lithography system that generates and prints 3D images on surfaces with one mask at one exposure. Still in R&D, the system is initially targeted for advanced ... » read more

Manufacturing Bits: July 11


China’s storage ring for EUV A group of researchers are banding together to propel the development of a storage ring technology that may one day be used as a power source for extreme ultraviolet (EUV) lithography. The collaboration includes five institutions. Researchers have organized an informal collaboration or study group with plans to develop a storage ring for EUV based on a techno... » read more