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Advanced High Throughput e-Beam Inspection With DirectScan


Optical inspection cannot resolve critical defects at advanced nodes and cannot detect subsurface defects. Especially at 7nm and below, many yield and reliability killer defects are the result of interactions between lithography, etch, and fill. These defects often will have part per billion (PPB) level fail rates. Conventional eBeam tools lack the throughput to measure PPB level fail rates. A ... » read more

Industrial Radiography — CT Scanning for Metrology Applications


Xray technology, more specifically computed tomography (CT), has been adapted for use as an instrument of industrial metrology. Early adopters have quickly recognized the benefits of internal and external nondestructive testing for 3D defect detection and geometric analysis, while those considering adoption may be uncertain how to implement the technology effectively. This study was conducted t... » read more

CT Scanning Baseballs


Climate change, manufacturing tolerances or design changes? What caused so many more home runs in professional baseball this year? CyberOptics will not be able to help you learn how climate change affected the home run statistics this year, but utilizing 3D industrial CT scanning could help identify changes in baseball design and manufacturing which may have contributed to a record spike in hom... » read more

Scan Compression Is No Longer About Compression


Scan compression was introduced in the year 2000 and has seen rapid adoption. Nearly every design’s test methodology today implements this technology, which inserts compression logic in the scan path between the scan I/Os and the internal chains. In this article, we take a critical look at the technology to understand how scan compression has matured. The road to scan compression Since th... » read more

Highly Efficient Scan Diagnosis With Dynamic Partitioning


Charged with the task of improving yield, product engineers need to find the location of defects in manufactured ICs quickly and efficiently. Typically, they use volume scan diagnosis to generate large amounts of data from failing test cycles, which is then analyzed to reveal the location of defects. Scan failure data provides the basis for many decisions in the failure analysis and yield impro... » read more