AFM-on-a-chip
An atomic force microscope (AFM) is a metrology tool that can measure and characterize structures in three dimensions. It uses a tiny probe to enable measurements in chip structures, but the instrument itself is often a large and bulky system.
In response, the University of Texas at Dallas has devised an AFM-on-a-chip technology. The AFM is roughly the size of a dime. Based on...
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