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Beyond 5nm: Review of Buried Power Rails & Back-Side Power

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A new technical paper titled “A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes” is presented by researchers at UT Austin, Arm Research, and imec.

Find the technical paper here. Published July 2022.

S. S. T. Nibhanupudi et al., “A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes,” in IEEE Transactions on Electron Devices, vol. 69, no. 8, pp. 4453-4459, Aug. 2022, doi: 10.1109/TED.2022.3186657.

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