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E-Beam Review And CD Measurement Revolutionizes Display Yield Management

Particles that were not problematic before may now become “killer” defects in the display industry.

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Fundamental changes are occurring in the display industry, driven by demands for higher-resolution screens and other capabilities for both mobile and TV applications.

To meet these demands, the display technology roadmap in this article calls for innovations in materials, processes and device technology. Critical requirements include smaller design rules and the adoption of a range of materials including copper (Cu), metal-oxides (MOx), low-temperature polysilicon (LTPS), organic LEDs (OLEDs) and even quantum dots (QDs). But new process- and materials-engineering expertise, as well as new yield-management strategies, are also required.

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