Sputtered transparent electrodes for optoelectronic devices: Induced damage and mitigation strategies


Abstract: Summary "Transparent electrodes and metal contacts deposited by magnetron sputtering find applications in numerous state-of-the-art optoelectronic devices, such as solar cells and light-emitting diodes. However, the deposition of such thin films may damage underlying sensitive device layers due to plasma emission and particle impact. Inserting a buffer layer to shield against such da... » read more

Reducing Rework In CMP: An Enhanced Machine Learning-Based Hybrid Metrology Approach


By Vamsi Velidandla, John Hauck, Zhuo Chen, Joshua Frederick, and Zhihui Jiao The semiconductor industry is constantly marching toward thinner films and complex geometries with smaller dimensions, as well as newer materials. The number of chemical mechanical planarization (CMP) steps has increased and, with it, a greater need for within-wafer uniformity and wafer-to-wafer control of the thin... » read more

Power/Performance Bits: Dec. 15


Graphite films for cooling electronics Researchers at King Abdullah University of Science and Technology (KAUST) developed a way to make a carbon material well suited to dissipating heat in electronic devices. Graphite films are frequently used for heat management. "However, the method used to make these graphite films, using polymer as a source material, is complex and very energy intensiv... » read more

Power/Performance Bits: Aug. 10


Flexible electrodes for thin films Researchers from the University of Queensland and ARC Centre of Excellence in Exciton Science (University of Melbourne) developed a material for flexible, recyclable, transparent electrodes that could be used in things like solar panels, touchscreens, and smart windows. Eser Akinoglu of the ARC Centre of Excellence in Exciton Science said, "The performance... » read more

The Chemistry Of Semiconductors


At each new process node, the chemistry of chip manufacturing has become much more complex than at previous nodes. But at 5nm and below, it's going to get orders of magnitude more complex. For the first few decades, the chemistry of chips was largely shielded from view for most of the industry. Caustic gases were relatively well understood because they are a potential health hazard, but the ... » read more

Thin Film Characterization For Advanced Patterning


Authors: Zhimin Zhu; Xianggui Ye; Sean Simmons; Catherine Frank; Tim Limmer; James Lamb Brewer Science, Inc. (United States) A variable-angle spectroscopic ellipsometer (VASE) is an essential tool for measuring the thickness of a thin film, as well as its n and k optical parameters. However, for films thinner than 10 nm, precise measurement is very challenging. In this paper, the root cause... » read more

Planarization Challenges At 7nm And Beyond


Dan Sullivan, executive director of semiconductor technology at Brewer Science, digs into the challenges of planarizing a thin film on a wafer for etch and optical control. The problem becomes more difficult at advanced nodes because the films are thinner. https://youtu.be/iNA6EGpoYZU     _________________________________ See more tech talk videos here   » read more

Power/Performance Bits: Aug. 7


Optical neural network Researchers at the National Institute of Standards and Technology (NIST) have made a silicon chip that distributes optical signals precisely across a miniature brain-like grid, showcasing a potential new design for neural networks. Using light would eliminate interference due to electrical charge and the signals would travel faster and farther, said the researchers. "... » read more

Power/Performance Bits: April 24


Waste heat to power Engineers at the University of California, Berkeley, developed a thin-film system that can be applied to electronics to turn waste heat into energy. The thin-film system uses pyroelectric energy conversion, which is well suited for tapping into waste-heat energy supplies below 100 degrees Celsius, called low-quality waste heat. In particular, the technology might be part... » read more

Power/Performance Bits: Jan. 30


Wavy display architecture Researchers at KAUST developed a new transistor architecture for flexible ultrahigh resolution devices aimed at boosting the performance of the display circuitry. Flat-panel displays use thin-film transistors, acting as switches, to control the electric current that activates individual pixels consisting of LEDs or liquid crystals. A higher field-effect mobility of... » read more

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