What AI and ML can do for semiconductor test and measurement.
Currently, the semiconductor manufacturing industry uses artificial intelligence and machine learning to take data and autonomously learn from that data. With the additional data, AI and ML can be used to quickly discover patterns and determine correlations in various applications, most notably those applications involving metrology and inspection, whether in the front-end of the manufacturing process or in the back-end. These applications may include AI-based spatial pattern recognition (SPR) systems for inline wafer monitoring [2], automatic defect classification (ADC) systems with machine-learning models and machine learning-based optical critical dimension (OCD) metrology systems [1][7].
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