Using virtual fabrication to overcome the limitations of PVD at 16nm and beyond.
Physical Vapor Deposition (PVD) for Back-End-of-Line (BEOL) metallization is being pushed to the limits at the 16-nanometer (nm) technology node and beyond. Extending PVD for metal liner and barrier seed deposition is forcing the process into a narrow window that must be characterized prior to manufacturing introduction. Furthermore, understanding the liner dependency on the trench and via etch profile helps to identify process requirements for maximizing the process window. Destructive characterization required to properly define the process window poses severe analytical resource challenges. Virtual fabrication with a 3D process modeling platform can overcome this obstacle. A hypothetical M1-V1-M2 BEOL via chain is used to demonstrate the value of new capabilities of the SEMulator3D 2013 platform for predictive design-technology modeling, variation analysis and quantitative data extraction.
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Disaggregation and the wind-down of Moore’s Law have changed everything.
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Continued expansion in new and existing markets points to massive and sustained growth.
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Experts at the Table: Designing for context, and geopolitical impacts on a global supply chain.
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Some 300mm tools are converted to 200mm; equipment prices and chip manufacturing costs are rising.
From low resistance vias to buried power rails, it takes multiple strategies to usher in 2nm chips.
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Disaggregation and the wind-down of Moore’s Law have changed everything.
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