Non-Destructive Measurement of Bottom Width in Deep Trench Isolation Structures using IRCD Metrology


As scaling in semiconductor devices continues, the aspect ratios of deep trench isolation (DTI) structures have increased. DTI structures are used in power devices, power management ICs and image sensors as a method to isolate active devices by reducing crosstalk, parasitic capacitance, latch-up and allowing for an increase breakdown voltage of active devices. Measurement of these structures in... » read more

CMP Process Characterization Using White Light Interferometry


Faster computer and electronic processors require smaller features for integrated circuits (IC), which in turn require smaller and smoother substrate surfaces. Chemical mechanical polishing (CMP) has become one of the most critical semiconductor fabrication technologies because it offers a superior means of removing unwanted topography in interlevel dielectric layers and achieving sufficient pl... » read more

Standardizing Defect Coverage In Analog/Mixed Signal Test


A newly drafted IEEE standard will bring more consistency to defect metrics in analog/mixed (AMS) designs, a long-overdue step that has become too difficult to ignore in the costly heterogeneous assemblies being deployed inside of data centers and mobile devices. Standardizing analog is no simple feat due to the legacy approach to AMS design, and this is not the first attempt at improving te... » read more

From Mobile Phones To Robotics: How The Industry Continues To Drive Innovation


I recently had the opportunity to host Pierre Cambou, Principal Analyst for Global Semiconductors at Yole Group, on the Advantest podcast. What struck me about our conversation was while we focused on what was going on in the mobile market, the entire talk was reflective of the cyclical nature of the semiconductor industry and how technology can drive intense cycles of innovation. As Pierre ... » read more

Introduction to the PXI Architecture


PXI systems provide high-performance modular instruments and other I/O modules with specialized synchronization and key software features for test and measurement applications from device validation to automated production test. For a high-level understanding of PXI, see the two images in Figure 1 that compare a PXI system’s chassis, controller, and PXI(e) peripheral modules to components of ... » read more

Flip-Chip Bonding Technique To Excite LN Resonators Via Noncontact Electrodes (Yale)


A new technical paper titled "Noncontact excitation of multi-GHz lithium niobate electromechanical resonators" was published by researchers at Yale University. Abstract "The demand for high-performance electromechanical resonators is ever-growing across diverse applications, ranging from sensing and time-keeping to advanced communication devices. Among the electromechanical materials being ... » read more

Research Bits: Sept. 9


All-silicon polarization multiplexer Researchers from the University of Adelaide and Osaka University propose an ultra-wideband integrated terahertz polarization (de)multiplexer implemented on a substrateless silicon base, which they tested in the sub-terahertz J-band (220-330 GHz) for 6G communications. “Our proposed polarization multiplexer will allow multiple data streams to be transmi... » read more

Chip Industry Technical Paper Roundup: Sept. 9


New technical papers recently added to Semiconductor Engineering’s library: [table id=354 /] More ReadingTechnical Paper Library home » read more

Fano Resonance in a Si PIC Using a Piezoelectrically Driven Mechanism (Ghent, imec)


A new technical paper titled "Piezoelectrically driven Fano resonance in silicon photonics" was published by researchers at Ghent University and imec. Abstract "Piezoelectric optomechanical platforms provide a promising avenue for efficient signal transduction between microwave and optical domains. Lead zirconate titanate (PZT) thin film stands out as a compelling choice for building such... » read more

New Strategies For Enhancing Transport Properties of Conducting Polymers (Cambridge, et al.)


A new technical paper titled "Non-equilibrium transport in polymer mixed ionic–electronic conductors at ultrahigh charge densities" was published by researchers at Cambridge University, Grenoble Alpes University, CNRS, Humboldt-Universität zu Berlin, et al. Abstract "Conducting polymers are mixed ionic–electronic conductors that are emerging candidates for neuromorphic computing, bioel... » read more

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