Research Bits: Jan. 20


ALD for Ru wiring Researchers from Ulsan National Institute of Science and Technology (UNIST), Hongik University, and Tanaka Precious Metal Technologies developed an atomic layer deposition (ALD) process for creating chip interconnects using a ruthenium (Ru) precursor with a thermal stability up to 400 °C. The high-temperature ALD process can produce dense, high-quality Ru films without deg... » read more

Chip Industry Technical Paper Roundup: Jan. 20


New technical papers recently added to Semiconductor Engineering’s library: [table id=515 /] Find more semiconductor research papers here. » read more

Chip Industry Technical Paper Roundup: Jan 12


New technical papers recently added to Semiconductor Engineering’s library: [table id=513 /] Find more semiconductor research papers here. » read more

Research Bits: Jan. 12


Wafer-scale two-photon lithography Researchers from Lawrence Livermore National Laboratory (LLNL) and Stanford University demonstrated a two-photon lithography (TPL) platform for wafer-scale manufacturing. The TPL platform uses large arrays of metalenses to split a femtosecond laser into more than 120,000 coordinated focal spots that write simultaneously across centimeter-scale areas. The a... » read more

Research Bits: Jan. 6


Ultrathin ferroelectric capacitors Researchers from the Institute of Science Tokyo and Canon ANELVA Corporation built an ultrathin ferroelectric memory capacitor stack using scandium-substituted aluminum nitride ((Al,Sc)N) thin films with platinum electrodes. The total thickness is just 30nm: a 20nm ferroelectric layer sandwiched between 5nm platinum top and bottom electrodes. “Previous r... » read more

Chip Industry Technical Paper Roundup: Jan 6


New technical papers recently added to Semiconductor Engineering’s library: [table id=510 /] Find more semiconductor research papers here. » read more

Chip Industry Technical Paper Roundup: Dec 30


New technical papers recently added to Semiconductor Engineering’s library: [table id=509 /] Find more semiconductor research papers here. » read more

Research Bits: Dec. 22


Photonic memory Researchers from the University of Southern California Information Sciences Institute and the University of Wisconsin-Madison fabricated a regenerative photonic latch memory on GlobalFoundries’ commercial silicon photonics platform, a step towards building a complete photonic SRAM system. The memory cell can store data as light and regenerate the signal to keep it stable a... » read more

Chip Industry Technical Paper Roundup: Dec 22


New technical papers recently added to Semiconductor Engineering’s library: [table id=506 /] Find more semiconductor research papers here and in the most recent Chip Industry Week in Review. » read more

Research Bits: Dec. 16


Back-end integration Researchers from Massachusetts Institute of Technology (MIT) and the University of Waterloo propose a back-end integration platform that enables the fabrication of transistors and memory devices in a single compact stack on a chip. The approach uses amorphous indium oxide as the active channel layer of the back-end transistor. The properties of indium oxide allow a thin... » read more

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