How Curvilinear Mask Writing Affects Chip Design

The impact of curved shapes on design rules and manufacturability.


As chips become more complex and features continue to shrink, it becomes more difficult to print shapes on photomasks. The ability to print curvilinear masks changes that equation, but not all of the pieces in the flow are automated today. Aki Fujimura, CEO of D2S, talks about what has to change, what will the impact be on design rules, and why using curvilinear shapes can shrink the manufacturing rule decks.

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