Experts At The Table: Process Technology Challenges


By Mark LaPedus Semiconductor Manufacturing & Design sat down to discuss future transistor, process and manufacturing challenges with Subramani Kengeri, vice president of advanced technology architecture at GlobalFoundries; Carlos Mazure, chief technical officer at Soitec; Raj Jammy, senior vice president and general manager of the Semiconductor Group at Intermolecular; and Girish Dixit, v... » read more

Experts At The Table: Process Technology Challenges


By Mark LaPedus Semiconductor Manufacturing & Design sat down to discuss future transistor, process and manufacturing challenges with Subramani Kengeri, vice president of advanced technology architecture at GlobalFoundries; Carlos Mazure, chief technical officer at Soitec; Raj Jammy, senior vice president and general manager of the Semiconductor Group at Intermolecular; and Girish Dixit, v... » read more

Experts At The Table: Process Technology Challenges


By Mark LaPedus Semiconductor Manufacturing & Design sat down to discuss future transistor, process and manufacturing challenges with Subramani Kengeri, vice president of advanced technology architecture at GlobalFoundries; Carlos Mazure, chief technical officer at Soitec; Raj Jammy, senior vice president and general manager of the Semiconductor Group at Intermolecular; and Girish Dixit, v... » read more

Consortium Mania Sweeps 450mm Landscape


By Mark LaPedus In the mid-1990s, the semiconductor industry embarked on a costly and problematic migration from 200mm to 300mm wafer fabs. At the time, the 300mm development efforts were in the hands of two groups—Sematech and a Japanese-led entity. The equipment industry was on the outside looking in. And as a result, the migration from 200mm to 300mm fabs was out of sync and a nightma... » read more

The Bumpy Road To 450mm


By Mark LaPedus After its formation nearly 20 months ago, a 450mm consortium has reached its latest milestone by recently completing a cleanroom and installing the first 450mm demonstration tools in the facility. The so-called Global 450 Consortium (G450C) also has set a goal to bring 450mm fabs into high-volume manufacturing at the 10nm or 7nm nodes by 2018. That gives the industry a littl... » read more

Experts At The Table: IC Manufacturing Challenges


By Mark LaPedus Semiconductor Manufacturing & Design sat down to discuss future manufacturing challenges with Carlos Mazure, chief technical officer at Soitec; Jeff Hebb, vice president of laser product marketing at Ultratech; Markus Wimplinger, corporate technology development and IP director at EV Group; and Girish Dixit, vice president of the customer integration center and process inte... » read more

Experts At The Table: IC Manufacturing Challenges


By Mark LaPedus Semiconductor Manufacturing & Design sat down with Carlos Mazure, chief technical officer at Soitec; Jeff Hebb, vice president of laser product marketing at Ultratech; Markus Wimplinger, corporate technology development and IP director at EV Group; and Girish Dixit, vice president of the customer integration center and process interactions at Lam Research. What follows are ... » read more

Experts At The Table: IC Manufacturing Challenges


By Mark LaPedus Semiconductor Manufacturing & Design sat down to discuss future manufacturing challenges with Carlos Mazure, chief technical officer at Soitec; Jeff Hebb, vice president of laser product marketing at Ultratech; Markus Wimplinger, corporate technology development and IP director at EV Group; and Girish Dixit, vice president of the customer integration center and process inte... » read more

Capping Tools Tame Electromigration


By Mark LaPedus The shift towards the 28nm node and beyond has put the spotlight back on the interconnect in semiconductor manufacturing. In chip scaling, the big problem in the interconnect is resistance-capacitance (RC). Another, and sometimes forgotten, issue is electromigration. “Electromigration gets worse in device scaling,” said Daniel Edelstein, an IBM Fellow and manager of BE... » read more

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