tag: MEMS

Stacked Die Changes
By Ed Sperling - 27 Jul, 2016 - Comments: 0

Semiconductor Engineering sat down to discuss advanced packaging with David Pan, associate professor in the department of electrical and computer engineering at the University of Texas; Max Min, senior technical manager at Samsung; John Hunt, senior director of engineering at ASE; and Sitaram Arkalgud, vice president of 3D portfolio and technologies at Invensas. What follows are excerpts of tha... » read more

Virtual Fabrication For MEMS Process Development
By Coventor - 20 Jul, 2016 - Comments: 0

MEMS fabrication and design are closely coupled, such that design changes could significantly alter the process flow and vice versa. For instance, setting device parameters such as drive capacitance, deflection distance, or proof mass size directly affects the choice of film thickness, etch rate, sidewall profile and so forth. Typically, this requires multiple iterations of the MEMS design/proc... » read more

Atomic Layer Etch Heats Up
By Mark LaPedus - 29 Jun, 2016 - Comments: 0

The atomic layer etch (ALE) market is starting to heat up as chipmakers push to 10nm and beyond. ALE is a promising next-generation etch technology that has been in R&D for the last several years, but until now there has been little or no need to use it. Unlike conventional etch tools, which remove materials on a continuous basis, ALE promises to selectively and precisely remove targete... » read more

MEMSIC Solves The Accelerometer Puzzle
By Mentor, a Siemens Business - 02 Jun, 2016 - Comments: 0

Accelerometers play a valuable role in many markets. Your smart phone has them, as does your car. Measuring the rate of change in velocity seems to have unlimited applications. While there are many design techniques available to create an accelerometer, MEMSIC Inc. developed a MEMS and CMOS IC technology with no moving parts using Tanner tools. Using a unique thermal technology, acceleration is... » read more

Life on the Edge of IoT
By Jeff Miller - 02 Jun, 2016 - Comments: 0

The world on the edge of the IoT provides a rich microcosm to explore. While much of the attention paid to IoT is on big data applications in the cloud or the world of aggregating massive data provided by the real-world edge devices in the wild though cellphones and gateways, the edge devices themselves present a cornucopia of design challenges and exciting applications. Sensors and actuators m... » read more

The Trouble With MEMS
By Ed Sperling - 25 May, 2016 - Comments: 0

The advent of the Internet of Things will open up a slew of new opportunities for MEMS-based sensors, but chipmakers are proceeding cautiously. There are a number of reasons for that restraint. Microelectromechanical systems are difficult to design, manufacture and test, which initially fueled optimism in the MEMS ecosystem that this market would command the same kinds of premiums that analo... » read more

Toward Better Acoustic Resonators
By Mattan Kamon - 19 May, 2016 - Comments: 0

After some lively conversations with the top researchers in MEMS acoustic resonators during the 2014 Sensors and Actuators Workshop (familiarly known to the MEMS community as “Hilton Head”), we set to work on a simulation solution to better serve researchers and commercial designers. Acoustic resonators for RF filtering have received a lot of attention in the past few years as the number... » read more

Building A Better Resonator
By Katherine Derbyshire - 19 May, 2016 - Comments: 0

The resonant frequency of a beam depends on the mass and stiffness of the beam. Resonance has always been important in the design of musical instruments and amplification systems, as well as the design of bridges and buildings. With the advent of MEMS fabrication techniques, though, came the ability to create very small beams, in the micron or nanometer size range, with resonant frequencies ... » read more

The Future Of MEMS Sensor Design And Manufacturing
By Stephen Breit - 21 Apr, 2016 - Comments: 0

I recently gave an invited talk at the IEEE Inertial Sensors 2016 symposium that discussed the future of commodity MEMS inertial sensor design and manufacturing. Inertial sensors comprise one of the fastest growing and most successful segments of the MEMS market. There are three industry trends that I believe will have major implications for motion sensor design and manufacturing and, more g... » read more

IoT Design Challenges
By Jeff Miller - 04 Feb, 2016 - Comments: 0

Low-cost IoT designs that interface with the real world incorporate multiple design domains that individually are challenging for today’s engineers, so it’s no surprise that putting them all together creates extreme pressure on IoT design teams. The typical IoT device contains a sensor and an actuator that interface to the Internet. The sensor creates a signal based on some real-world ac... » read more

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