Double Patterning: Challenges And Possible Solutions In Parasitics Extraction

By Dusan Petranovic and David Abercrombie Double patterning (DP), as the simplest form of multi-patterning techniques, is receiving lots of attention right now. The need for double patterning techniques is driven by the physical limits of the dimensions that can be resolved with current light sources and lenses, as well as by the difficulties and delays in deploying next-generation lithography... » read more