Non-Destructive Metrology Techniques For Measuring Hole Profile In DRAM Storage Node


DRAM storage node profile measurement during high aspect ratio (HAR) etch has been one of the most challenging metrology steps. DRAM storage node profile affects refresh time and device electric quality. So, controlling this profile is one of the key challenges. Conventional 3D modeling in Optical Critical Dimension (OCD) metrology has typically used multiple cylinder stacks. This method cannot... » read more

Cost And Quality Of Chiplets


Chiplets add a whole new challenge for the semiconductor industry. How much testing is enough? How do you optimize system binning? What’s the right amount of burn-in? The answers to these questions will vary, depending upon cost and quality tradeoffs, the number and source of the chiplets, and real-world workloads and projected lifespans. Marc Jacobs, senior director of solutions architectur... » read more

Using Picosecond Ultrasonics To Measure Trench Structures In SiC Power Devices


The road to the future is not always a smooth, trouble-free drive. Along the way, there may be unforeseen detours, potholes and accidents, each one capable of setting progress back. But for those behind the wheel, those obstacles are just a part of the journey. Such is the case for the automotive industry as it continues to steer away from gas-powered vehicles and turn toward hybrid and elec... » read more

Silent Data Corruption Considerations For Advanced Node Designs


Ensuring reliability, availability, and serviceability (RAS) has long been an important consideration for many types of electronic systems, with major implications for chip design. Clearly, military hardware must be very reliable, and servers and automotive systems are also expected to be available constantly. Some amount of failure is inevitable, so being able to repair, avoid, or mitigate fau... » read more

DTCO/STCO Create Path For Faster Yield Ramps


Higher density in planar SoCs and advanced packages, coupled with more complex interactions and dependencies between various components, are permitting systematic defects to escape traditional detection methods. These issues increasingly are not detected until the chips reach high-volume manufacturing, slowing the yield ramp and bumping up costs. To combat these problems, IDMs and systems co... » read more

Reaching For The Stars: Embracing Non-Terrestrial Networks In The Age Of 5G And Beyond


In the realm of modern connectivity, the race towards faster, more reliable networks has been relentless. With the advent of 5G technology, humanity is on the brink of a new era of communication, promising unprecedented speeds and capabilities. However, as we stand on the precipice of this digital revolution, it's imperative to look beyond the terrestrial confines that have defined our networks... » read more

AI/ML Challenges In Test and Metrology


The integration of artificial intelligence and machine learning (AI/ML) into semiconductor test and metrology is redefining the landscape for chip fabrication, which will be essential at advanced nodes and in increasingly dense advanced packages. Fabs today are inundated by vast amounts of data collected across multiple manufacturing processes, and AI/ML solutions are viewed as essential for... » read more

X-ray Inspection In The Semiconductor Industry


With the ever-present pressure to produce more efficient devices with more power, the sizes of the structures and electrical connections in the production of chips have become smaller and smaller. In addition, the sheer number of these connections in a given unit area have also increased in a spectacular way. At the heart of all X-ray inspection, whether it is manual or fully automated metrolog... » read more

Laser Wavelength Selection In Raman


Laser wavelength selection, a critical determinant of accuracy and data quality, is guided by factors such as resonance, fluorescence, and sample absorption. Ensuring the correct laser wavelength leads to optimal excitation and signal strength, facilitating precise and informative analysis. Luminous evolution In the early days of Raman spectroscopy, light sources like arc lamps and incan... » read more

Strategies For Detecting Sources Of Silent Data Corruption


Engineering teams are wrestling with how to identify the root causes of silent data corruption (SDC) in a timely and cost-effective way, but the solutions are turning out to be broader and more complex than simply fixing a single defect. This is particularly vexing for data center reliability, accessibility and serviceability (RAS) engineering teams, because even the best tools and methodolo... » read more

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