Increasing Roles For Robotics In Fabs

Different types of robots with greater precision and mobility are beginning to be deployed in semiconductor manufacturing, where they are proving both reliable and cost-efficient.

Static robots have been used for years inside of fabs, but they now are being supplemented by collaborative robots (cobots), autonomous mobile robots (AMRs), and autonomous humanoid robots to meet growing and widening demands.

“Robots perform tasks autonomously that otherwise would need to be done manually by humans,” said Marco da Silva, vice president and general manager for Spot at Boston Dynamics. “Some of the best tasks for robots are those that are dangerous for people, or very repetitive in nature. Deploying robots for autonomous inspections and regular rounds and readings cuts down on the time maintenance teams spend looking for problems, so they have more wrench time to actively fix them.”

Fig. 1: Boston Dynamics’ robot Spot waiting to cross a busy street outside of Semicon West. Source: Ed Sperling/Semiconductor Engineering

As semiconductor fabs become increasingly smart, and ultimately autonomous, robotics will play an even greater role. This transition will take time, however. In addition to the up-front investment, which can be substantial, there are additional costs and challenges associated with integrating new robotic capabilities with legacy systems, as well as workforce training required to manage these advanced systems.

Still, the potential benefits are significant. From the precise handling of delicate wafers to the autonomous monitoring of fab and sub-fab conditions, robots already are becoming indispensable in semiconductor manufacturing.

“We anticipate continuous changes and digitalization in the coming years,” said Simon Chang, department manager for smart manufacturing at UMC. “The rapid advancements in technology, and the increasing demand for higher efficiency and precision in semiconductor manufacturing, drive us to constantly evolve and upgrade our robotic systems and automation processes.”

The robotics evolution
The evolution of robotics in semiconductor manufacturing has been a journey from simple automated arms to sophisticated, autonomous systems that can perform a wide range of tasks with minimal human intervention. Initially, robots primarily performed wafer handling and other repetitive tasks requiring precision but little adaptability. Today, a new generation of robots can both handle delicate materials and use AI/ML to learn, adapt, and even anticipate issues before they arise.

“State-of-the-art semiconductor manufacturing facilities are designed and built with automation integrated into them from the start,” said Adrien Plouffe, senior engineer for factory automation at GlobalFoundries. “Autonomous and semi-autonomous robots are able to breathe new life into existing facilities and extend their useful life significantly. Logistics, tool inspections, facility process controls, and life safety are just a few of the tasks where these robots have shown incredible promise.”

Robots are now being designed with the ability to operate autonomously in highly dynamic environments, making real-time decisions and adjustments as they work. This capability is particularly crucial in semiconductor fabs, where even minor variations in process conditions can negatively impact yield and quality.

“Since robots in semiconductor fabs handle lightweight and compact materials, their sensors, vision systems, and drive motors must be extremely precise — down to the sub-millimeter level,” said DeukYong Yun, senior director and Automation Engineering Division manager at Amkor Technology Korea. “Mobility is also crucial, requiring sufficient speed, stability, and economical energy consumption.”

As semiconductor manufacturing continues to advance, the demand for robots that can perform multiple functions with human-like tasks is growing. The current generation of robots excels at specific, repetitive tasks, but the next frontier lies in developing multifunctional robots that can adapt to various roles within the fab. These robots are designed to work alongside humans, enhancing productivity and safety by taking over tasks that are either too dangerous or too monotonous for human workers.

“Recently, our customer support business group put the industry’s first collaborative maintenance robot, or cobot, into a production fab at a leading customer,” said Tim Archer, CEO of Lam Research, in a recent earnings call. “Cobots helped execute complex maintenance tasks with precision and reliability, leading to improved tool-to-tool performance matching and higher equipment availability. Also, we believe cobots, as a new service offering, can play an important role in addressing anticipated skilled labor shortages as semiconductor manufacturing expands and becomes more regionalized.”

This push toward multi-functionality is driven by the need for greater flexibility in manufacturing processes. As semiconductor fabs become more complex, the ability to quickly adapt to different tasks without extensive reprogramming or equipment changes is becoming increasingly valuable. Robots equipped with advanced sensors, AI, and machine learning capabilities are at the forefront of this shift, enabling them to perform multiple tasks and to operate with a level of autonomy that reduces the need for constant human oversight.

“We are on the cusp of a significant transformation,” said Peri Kasthuri, COO at C-Hawk Technology. “The ability to compute faster, interpret data in real-time, and make better decisions at the machine level is driving the evolution of robotics. As technology evolves, the demand for robots that can handle multiple tasks and adapt to various roles within the fab will only increase.”

Addressing manufacturing challenges
Robotics in semiconductor manufacturing involves more than just performing tasks faster or more accurately. Robots also can be used to address some of the industry’s most pressing challenges. For example, they play a crucial role in improving the efficiency and reliability of semiconductor manufacturing processes.

“In legacy fabs where space is limited and ceilings are low, we see a big potential for autonomous mobile robots to carry wafer boxes from machine to machine,” said Christian Felkel, business development manager for semiconductors at Kuka Robotics. “Overhead hoist transport (OHT) systems can’t be installed in those facilities, making AMRs a critical solution for automation.”

Fig. 2: Autonomous mobile robot (AMR). Source: Kuka

The design and form factor of robots are critical to successful deployment in semiconductor manufacturing. As robots evolve from fixed, stationary units to mobile platforms capable of navigating complex fab layouts, their design must address the unique constraints of these environments. This includes not only the physical dimensions of the robots, but also their ability to interact seamlessly with existing infrastructure.

“In semiconductor manufacturing, design and construction are essential for the application of automation solutions,” explains Amkor’s Yun. “Factors such as ceiling height, dedicated robot transport elevators, and vertical transfer system (VTS) holes must be considered to ensure that robots can operate efficiently within the fab.”

These environmental considerations are particularly important when implementing mobile robots that need to move freely and perform tasks across different sections of the facility. Boston Dynamics’ robot, named Spot, is a good example of a compact design that caters to the specific needs of semiconductor fabs.

“Robots like Spot are designed with a focus on versatility and adaptability, enabling them to perform a wide range of tasks, from visual inspections to monitoring thermal conditions,” said da Silva. “These robots are used to monitor thermal conditions, read analog gauges, detect air leaks, and provide critical insights that help maintain facility operations and track performance metrics.”

This adaptability in design is crucial as fabs become more complex and require robots that can navigate tight spaces, handle delicate materials, and integrate into existing workflows without significant modifications to the environment.

“To implement fully autonomous robots, they must possess exceptional handling and avoidance capabilities similar to those of humans,” adds Yun. “This requires robots to not only perceive their environment with a high degree of accuracy, but also to make real-time decisions based on that perception.”

AI/ML and robotics converge
The convergence of AI/ML and robotics is driving significant advancements in the perceptive and cognitive capabilities of robots, enabling them to perform more complex and varied tasks with greater autonomy. This integration allows robots to learn from their experiences, adapt to new situations, and even anticipate potential issues before they arise.

“In terms of autonomous inspection, more data is never the problem,” said GlobalFoundries’ Plouffe. “Robots today have the ability to be an extra set of eyes or ears to watch over equipment that was either inspected very sparingly, or at times not at all, due to area conditions or staffing capabilities, which has proven to be a significant challenge in the current economy.”

One of the most promising developments in this convergence is the potential for robots to be directly connected to a fab’s manufacturing execution system (MES). These robots can receive real-time data on production processes, enabling them to make immediate adjustments without waiting for human intervention. This capability dramatically reduces the time needed to address issues, improving overall equipment efficiency.

“Autonomous inspection is another incredible application for mobile robotics,” adds Plouffe. “In mature facilities with limited built-in sensorization, having one sensor that can go to the equipment instead of many sensors that each monitor one piece of equipment provides untapped data streams at a vastly reduced cost.”

This integration allows for immediate adjustments to be made without waiting for human intervention, thereby improving machine uptime and reducing delays. When a machine drifts out of its optimal parameters, a connected robot can autonomously make the necessary adjustments, eliminating the need for a human operator to diagnose the issue, suit up in cleanroom attire, and physically make the corrections. This saves time and significantly reduces the risk of errors.

“In our push toward zero defects, automation isn’t just about efficiency. It’s about ensuring that every step in our process meets the highest standards,” said Mike Mathews, executive director of manufacturing and logistics at Brewer Science. “By reducing the human element, we can focus on consistency and precision, which are crucial for meeting the stringent quality demands of our customers.”

The application of AI/ML in robotics is not limited to real-time adjustments. These technologies also enable predictive maintenance, where robots can anticipate equipment failures before they occur. By continuously monitoring the condition of machines, robots equipped with AI/ML can alert human operators to potential issues, allowing for preemptive maintenance that prevents costly downtime. This capability is particularly valuable in semiconductor fabs, where the cost of unexpected equipment failures can be significant.

“Predictive maintenance is a game-changer for our industry,” adds Amkor’s Yun. “By using AI/ML to monitor equipment conditions in real-time, we can address issues before they lead to downtime, ensuring that our operations run smoothly and efficiently.”

As AI/ML and robotics continue to evolve together, their impact on semiconductor manufacturing will only grow. The ability of robots to learn, adapt, and autonomously manage complex processes is setting the stage for the next generation of semiconductor fabs — facilities that are both automated and smart.

“We are fully committed to moving toward fully autonomous robots,” said UMC’s Chang. “We are progressing from an automatic factory to an intelligent factory, and ultimately aiming for an autonomous factory. This strategy ensures that we are continuously integrating advanced robotics and automation technologies to enhance our production capabilities and efficiency. As an example, we’ve piloted autonomous mobile robots (AMR) to perform inspection rounds in our Fab 12A with successful results, and we intend to deploy AMR patrols across our fabs.”

Workforce impact
One of the most pressing issues in semiconductor manufacturing is the ongoing labor shortage. By taking over repetitive and physically demanding tasks, robots can free up human workers to focus on more strategic and value-added activities, thereby enhancing overall productivity. This approach optimizes the use of human resources while ensuring that critical manufacturing processes continue uninterrupted, even as the availability of skilled labor fluctuates.

Fig. 3: e-Atlas humanoid robot. Source: Boston Dynamics

This collaboration between humans and robots is not just about replacing manual labor. It’s about creating a synergistic relationship where both can perform at their best. Cobots are particularly notable in this regard. These robots are designed to work safely alongside humans, handling tasks that require precision and repeatability, thus freeing up human workers to engage in more complex problem-solving activities. Cobots can drive good repeatability and precision, but because they rely on human direction, they do not act as a replacement for staff.

“Robots must not only perform their tasks with precision but also integrate seamlessly with existing manufacturing systems to ensure they complement rather than disrupt the human workforce,” explained Aske Bach Lassen, director of strategic products and solutions at Teradyne Robotics during a presentation at SEMICON West. “Our focus has been on building systems that can adapt to the dynamic nature of semiconductor manufacturing, ensuring that each task is performed with the highest level of accuracy.”

The use of robots in semiconductor manufacturing also significantly reduces the risks associated with dangerous tasks, such as chemical handling and maintenance in high-risk environments. These tasks often expose workers to hazardous substances and increase the potential for contamination, both of which can be managed more effectively with autonomous robots or cobots. For instance, robots equipped with advanced sensors and AI capabilities can perform tasks like chemical transport and monitoring with a level of precision that minimizes the risk of accidents and exposure.

“Our focus on zero defects really drives us to minimize the human element in our processes,” adds Mathews. “Automation is critical in achieving that goal, ensuring consistency and precision throughout our chemical handling and manufacturing operations.”

In environments like semiconductor fabs, where maintaining a clean and controlled environment is crucial, the use of robots can help minimize human contact with sensitive materials, thereby reducing the likelihood of contamination. Robots can operate within stringent cleanroom protocols, performing tasks with the consistency and precision required to maintain the integrity of the manufacturing process.

“There is a clear benefit in deploying robots in scenarios where the potential for human error or contamination is high,” said Kuka’s Felkel. “Robots offer a level of precision and reliability that is essential for maintaining the quality and consistency of semiconductor production.”

While the idea of robots replacing human workers is a controversial topic, the reality is that robots are more likely to work alongside humans than replace them. This shift opens up new opportunities for workers to develop skills in robotics management, AI, and other emerging technologies.

“The prevalence of robots across the factory depends on volume, particularly for semiconductor space,” said C-Hawks Kasthuri. “As long as we are able to employ capital and provide resources that are needed to customize solutions, the coexistence of humans and robots is the future.”

Implementation challenges
One of the key challenges in this collaborative environment is the need for robots with advanced handling capabilities. Robots must be able to operate in confined spaces and respond to unexpected changes in their environment, such as variations in process conditions or the presence of human workers. While today’s robots are highly effective in performing predefined tasks, there is still a need to improve their ability to handle exceptions and navigate the complexities of semiconductor fabs.

In a presentation at SEMICON West, Joel Warner, staff engineer at Samsung Austin Semiconductor, highlighted the current limitations in robotics dexterity, particularly in comparison to human operators. “The degrees of freedom in the hand, the end effectors, is one of the last things that we really need to work on. We’ve seen advancements in dynamic motion, but the fine, dexterous movement required for tasks like putting an O-ring into a tool, or screwing in a screw, is still a significant challenge.”

Warner explained that human hands have 23 degrees of freedom, which allows for a wide range of precise movements and the ability to manipulate objects with high dexterity. In contrast, most current robotic hands have fewer degrees of freedom, limiting their ability to perform complex tasks with the same level of precision and flexibility as human hands. He emphasized that expanding the degrees of freedom in robotic hands is one of the last major hurdles that needs to be overcome to make robots more effective in tasks that require fine manipulation, particularly in semiconductor manufacturing where precision is crucial.

“The challenges we face with automation are evolving as the materials and processes become more complex,” says Matt Rich, controls engineering manager at Brewer Science. “We’re now managing systems with far more control points, and any small deviation can impact the entire process.”

The practical implementation of robotics in semiconductor manufacturing is also heavily influenced by factors such as battery life, cost, and the need for customization. One of the most significant financial considerations is the high initial investment required to implement robotic systems. This includes the cost of the robots, as well as the expense of integrating them into existing manufacturing processes, training staff, and ongoing maintenance.

“Robots must be cost-effective and reliable, especially in an industry where the margins are tight and the stakes are high,” said Kuka’s Felkel. “The challenge is balancing the upfront costs with the long-term benefits that robots can bring in terms of efficiency, precision, and reduced labor dependency.”

A major obstacle to achieving these benefits is the lack of systems integrators with the expertise required to seamlessly incorporate robots into existing semiconductor manufacturing environments. This gap often leads to delays and increased costs during the implementation phase. “The biggest challenge we face is the lack of experienced systems integrators who understand both mobile robotics and semiconductor manufacturing,” adds Felkel. “Without the right expertise, the integration process can become a bottleneck, delaying the deployment of robotic solutions and impacting overall productivity.”

Battery life is another crucial factor that impacts the practicality of deploying robots in semiconductor fabs. Robots must be able to operate for extended periods without interruption, particularly in environments where uptime is critical. This requires advances in battery technology and power management systems to ensure that robots can meet the demanding needs of semiconductor manufacturing without frequent recharging or downtime.

“The ROI for robotics in semiconductor fabs is not always immediate, but the long-term benefits can be substantial,” said C-Hawk’s Kasthuri. “As battery technology improves and robots become more autonomous, the economic case for their implementation becomes stronger.”

Customization is also a key consideration, as each semiconductor fab has unique requirements and constraints. Off-the-shelf robotic solutions may not fit seamlessly into existing operations, necessitating a degree of customization to ensure optimal performance. This can add to the overall cost and complexity of implementation, but it’s often necessary to achieve the desired outcomes.

“The current limitations in robot customization and adaptability are significant barriers,” adds Boston Dynamics’ da Silva. “However, as the technology evolves, we expect to see more flexible solutions that can be tailored to meet the specific needs of semiconductor manufacturers.”

The industry must focus on overcoming such barriers to ensure efficient and effective operation in the future’s fully autonomous fabs. “We’re not going to go from humanoids doing some small meaningful tasks to fully autonomous fabs overnight,” said Warner. “There’s going to be a warm collaboration period, where humanoids work alongside humans, gradually taking on more complex tasks as the technology evolves.”

Toward fully autonomous fabs
The future of robotics in semiconductor manufacturing is closely tied to industry investment and global initiatives aimed at boosting automation. The U.S. CHIPS Act and similar programs worldwide are driving significant investment, including the adoption of advanced robotics and automation technologies. This push for greater automation is expected to accelerate the development and deployment of robots in fabs, addressing labor shortages, improving efficiency, and enhancing the overall competitiveness of the industry.

“Robotics and automation are not just about reducing costs. They are about building a more resilient, flexible and competitive industry,” said Kasthuri. “The future of semiconductor manufacturing will be defined by how well we can integrate these technologies to create smarter — self-learning and compensating — and more efficient production environments.”

The journey toward fully autonomous semiconductor fabs is a complex one, requiring significant advancements in both technology and infrastructure. The potential for fully autonomous fabs hinges on the development of robots with advanced mobility and multifunctionality, capable of navigating and operating within the highly specialized environments of semiconductor manufacturing and that can process data and act independently, responding to the needs of the production environment in real-time.

“The biggest challenge is cross-system integration,” said Plouffe. “Mobile robots are built to work very well within the parameters of their software, but attempting to send/receive commands, or notifications to/from industrial systems, has required some unique solutions to achieve the end goal.”

The technical and environmental challenges are substantial, with issues such as layout constraints, ceiling heights, and the need for dedicated robot transport systems all playing critical roles in the feasibility of fully autonomous operations.

“Robots must be able to operate in confined and complex spaces with a high degree of precision and autonomy,” said Yun. “This requires not only advanced robotics technology but also a rethinking of fab layouts and building conditions to accommodate these new systems.”

Security issues also need to be resolved. The risk of losing IP to a potential hacker is a paramount concern for all semiconductor manufacturers. But the risks associated with hackers gaining control of cobots or autonomous robots inside a multi-billion facility are alarming in their potential for disruption.

“Security is a major concern, and it’s one of the biggest challenges we need to overcome,” said Kasthuri. “As we aim to make systems more interoperable, not just within confined spaces but also with the external world, we inevitably open up new channels for communication. This increases our vulnerability to attacks, and unfortunately, there are people out there who are very interested in exploiting these vulnerabilities. The more interconnected systems we have, the greater the motivation for these attacks.”

In addition to the technical hurdles, there is a growing need for training and education to prepare the next generation of fab workers. Trade schools and community colleges will play a vital role in equipping workers with the skills necessary to work alongside these advanced robotic systems. Standardized working conditions and materials, as well as a focus on safety and efficiency, will be essential in ensuring a smooth transition to autonomous fabs.

“Preparing the workforce for the future of semiconductor manufacturing is just as important as developing the technology itself,” adds Kasthuri. “We need to ensure that workers are not only comfortable with these new systems, but are also able to maximize their potential in a collaborative/co-existing environment.”

Conclusion
The future of semiconductor manufacturing is poised for change with the integration of advanced robotics and automation technologies. As we move closer to the realization of fully autonomous fabs, the potential benefits in terms of efficiency, precision, and reliability are too significant to ignore. However, this transition will require careful planning, investment, and collaboration between technology developers, fab operators, and educational institutions.

As robotics and AI/ML continue to evolve, their role in semiconductor fabs will expand, enabling new levels of automation and operational efficiency. The gradual integration of these technologies, supported by robust training and education programs, will ensure that the semiconductor industry remains at the forefront of technological advancement, ready to meet the challenges and opportunities of the future.

“The road to fully autonomous fabs is not without its challenges,” says Felkel. “But with continued investment and innovation, we are on the cusp of a new era in semiconductor manufacturing.”

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