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Manufacturing Execution System (MES)

Tracking a wafer through the fab.
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Description

A manufacturing execution system (MES) monitors, tracks, and documents the process of producing goods in a factory. It can also manage resource allocation, operations scheduling, process control, and data collection and analysis. MES stand between business software such as enterprise resource planning software and the plant floor control equipment.

In semiconductor fabs, MES typically includes serialization and work in process (WIP) tracking from the batch and lot level to the wafer and unit level. MES can also provide quality and yield analysis and control, such as root cause analysis, binning, and audit trail reports. Particular features for wafer fabs also can include reticle management, mask cleaning, and mask and tooling maintenance.