中文 English
Knowledge Center
Navigation
Knowledge Center

Optical Lithography

popularity

Description

Optical lithography is the mainstream patterning technology in today’s fabs. A scanner makes use of an optical projection lens and a deep ultraviolet excimer laser to produce light across a spectrum of wavelengths. The most common lasers are based on krypton fluoride at 248nm wavelengths and argon fluoride at 193nm wavelengths.

Multimedia

Variation At 10/7nm

Multimedia

Tech Talk: 7nm Litho

Multimedia

Tech Talk: Double-Triple Patterning

Multimedia

Next-Generation Lithography