How To Buy Used Fab Tools


Buying used equipment is a good way to find viable tools at reasonable prices. But the used equipment market is not a simple place to shop for good deals. As reported in this article, it’s a complex market. For example, buyers of fab tools can procure used gear from several sources—an OEM; a used equipment company; a broker; and through eBay. Some IDMs also sell used equipment. So what a... » read more

More Problems Ahead


Semiconductor Engineering sat down to discuss future scaling problems with Lars Liebmann, a fellow at IBM; Adam Brand, managing director of transistor technology at Applied Materials; Karim Arabi, vice president of engineering at Qualcomm; and Srinivas Banna, a fellow for advanced technology architecture at GlobalFoundries. SE: Where are the most severe issues these days? Is it on the design... » read more

More Problems Ahead


Semiconductor Engineering sat down to discuss future scaling problems with Lars Liebmann, a fellow at IBM; Adam Brand, managing director of transistor technology at Applied Materials; Karim Arabi, vice president of engineering at Qualcomm; and Srinivas Banna, a fellow for advanced technology architecture at GlobalFoundries. SE: There seems to be some debate in this group about whether we’r... » read more

Signoff Intensity On The Rise


By Ann Steffora Mutschler and Ed Sperling Lithography and signoff are crossing swords at 16/14nm and 10nm, creating new problems that raise questions about just how confident design teams will be when they sign off before tapeout — and how many respins are likely to follow. While designs at 20nm, 16nm and 14nm typically rely on colorless double patterning, at 10nm colors are mandatory. ... » read more

DSA: Hype Or Revolution?


Directed self-assembly (DSA) has become the subject of a great deal of research attention in the lithography world, to the point where there were dedicated sessions at this year’s Advanced Lithography conference in February. So is this just another passing research fad, or is it a technology that will revolutionize semiconductor manufacturing? DSA utilizes a block copolymer that effectivel... » read more

Why The Next Couple Process Nodes Are So Critical


In the greater scheme of things, one process node doesn't matter all that much. In fact, it has become common practice for big chipmakers to skip nodes for some of their chips as power issues becoming increasingly complex, time-to-market windows shrink and leapfrogging is viewed as a way to maximize resources while remaining über-competitive. But the next process node, and certainly the nex... » read more

Self-Aligned Double Patterning—Part Deux


In my last article, I introduced you to the basic Self-Aligned Double-Patterning (SADP) process that is one of the potential candidate techniques for processing metal layers at 10nm and below, but let’s have a quick recap. SADP uses a deposition and etch step process to create spacers surrounding a patterned shape (Figure 1). As you can see, there are two masking steps—the first mask is cal... » read more

EUV Is Key To 450mm Wafers


Whether the wafers in question are 200 mm in diameter, or 300 mm, or potentially 450 mm, larger wafer sizes have always been justified by manufacturing economics. If the cost to process a wafer stays the same, but the wafer contains more devices, then the cost per device goes down. For processes that apply to the entire wafer at once — etch, deposition, cleaning, and so forth — the equation... » read more

EUV Light Source Makes Progress


EUV Lithography light source maker, Gigaphoton has developed a laser-produced plasma (LPP) light source prototype model that can produce a maximum of 92 watts. This is more than double the 43 watts produced using a traditional LPP light source. Figure 1 conceptual diagram of EUV exposure. Source: Gigaphoton/EUVA The biggest issue with EUV lithography has been the output power of the lig... » read more

IP Integration Challenges Rising


It’s not just [getkc id="80" comment="lithography"] that is putting a crimp in sub-28nm designs. As more functions, features, transistors and software are added onto chips, the pressure to get chips out the door has forced chipmakers to lean more heavily on third-party IP providers. Results, as you might expect, have been mixed. The number of blocks has mushroomed, creating its own web of ... » read more

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