EUV Remains Elusive


By David Lammers Intel’s decision to invest as much as $4.1 billion in ASML has raised overall confidence levels in EUV lithography, and should allow the Dutch lithography vendor to funnel more funds into the stubbornly difficult effort to raise the EUV source power. ASML has said it needs to reach 250 Watts of average source power to achieve the 125 wph throughputs sought by its early cu... » read more

CNSE Readying NFX Fab for G450C, EUV Efforts


By David Lammers Two key areas of the semiconductor industry’s future—the 450mm wafer transition and EUV lithography—are the focus of the new NFX (NanoFab Xtension) building now under construction at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany. [caption id="attachment_6322" align="alignright" width="120" caption="Alain Kaloyeros"][/caption] T... » read more

ASMC: TSVs Needed as Scaling Challenges Mount


By David Lammers With the industry facing challenges in the introduction of EUV lithography and high costs for double patterning, TSV introductions have taken on heightened importance, participants said at the SEMI Advanced Semiconductor Manufacturing Conference (ASMC), held in Saratoga Springs, N.Y. in mid-May. Risto Puhakka, president of market research firm VLSI Research Inc., said the g... » read more