300mm Fab-Compatible Integration Flow for Planar 2D FETs (imec, KU Leuven)


Imec and KU Leuven researchers published "Integration and electrical evaluation of WS2 and MoS2 fets in a 300 mm pilot line." Abstract "2D materials have the potential to extend and augment the CMOS scaling roadmap. However, upscaling from lab-based demonstrators to 300 mm-compatible integration modules presents unique challenges. In this work, we address these challenges through ... » read more

Graphene and two-dimensional materials for silicon technology


Abstract: "The development of silicon semiconductor technology has produced breakthroughs in electronics—from the microprocessor in the late 1960s to early 1970s, to automation, computers and smartphones—by downscaling the physical size of devices and wires to the nanometre regime. Now, graphene and related two-dimensional (2D) materials offer prospects of unprecedented advances in device ... » read more