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Wafer Level Void-Free Molded Underfill For High-Density Fan-out Packages


In this study, experiments and mold flow simulation results are presented for a void-free wafer level molded underfill (WLMUF) process with High-Density Fan-Out (HDFO) test vehicles using a wafer-level compression molding process. The redistribution layer (RDL)-first technology was applied with 3 layers of a fine-pitch RDL structure. The test samples comprised 11.5 x 12.5-mm2 die with tall copp... » read more