High-NA EU Lithography: Extending The STCC Formula (Science Tokyo)


A new technical paper, "Source-position-dependent transmission cross coefficient formula including polarization and mask three-dimensional effects in high-numerical-aperture extreme ultraviolet lithography" was published by researchers at Institute of Science Tokyo. This work is based on the paper presented at SPIE Advanced Lithography + Patterning 2026. "The polarization effect is not negli... » read more

New Class Of Semiconductors Made Of Germanium-Tin Alloy (University of Edinburgh et al.)


A new technical paper "High Pressure and Compositionally Directed Route to a Hexagonal GeSn Alloy Class" was published by researchers at the University of Edinburgh, GFZ Helmholtz Centre for Geosciences, the University of Lille, Grenoble Alpes University, the University of Bayreuth and the European Synchrotron facility. Abstract "Despite their electronic dominance, cubic diamond structure... » read more

High Performance, Energy-Dense, Practical, And Reliable Solid-State Batteries (ORNL)


A technical paper titled “Tailoring of the Anti-Perovskite Solid Electrolytes at the Grain-Scale” was published by researchers at Oak Ridge National Laboratory. Abstract: "The development of thin, dense, defect-free solid electrolyte films is key for achieving practical and commercially viable solid-state batteries. Herein, we showcase a facile processing pathway for antiperovskite (Li2OH... » read more