CD Step Application in Edge Air Layer Structure Measurement for Bulk Acoustic Resonator

By Onto Innovation - 10 Mar, 2026 - Comments: 0

A vital component of modern communication systems, bulk acoustic wave resonators (BAW) function as filters, oscillators, and sensors. In a BAW device, the acoustic waves are confined within a specific region to achieve efficient resonance. The air ring structure, including the edge air layer structure, prevents acoustic energy from leaking. However, measuring the critical dimensions (CD) of edg... » read more

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tag: edge air layers

CD Step Application in Edge Air Layer Structure Measurement for Bulk Acoustic Resonator

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