tag: Fourier transform infrared spectroscopy

Advanced FTIR Optical Modeling for Hydrogen Content Measurements in 3D NAND Cell Nitride and Amorphous Carbon Hard Mask
By Onto Innovation - 11 Jun, 2024 - Comments: 0

Abstract Fourier Transform Infrared spectroscopy offers inline solutions for chemical bonding, epi thickness, and trench depth measurements. Through optical modeling of the transmission or reflectance spectra, information about the electronic structure and chemical composition may be obtained, which can be used for process control and monitoring. In this article, we demonstrate the measurement... » read more

FTIR On Earth, Mercury In Focus
By Xia Stammer - 08 Feb, 2024 - Comments: 0

On early hours on 19th October 2018 at Guiana Space Centre in Kourou in French Guiana an Ariane 5 rocket successfully launched the BepiColombo mission. It started its 7 years journey to Mercury. The joined mission of the European Space Agency (ESA) and the Japan Aerospace Exploration Agency (JAXA) was named in honor of Giuseppe “Bepi” Colombo, an Italian scientist who studied Mercury and fi... » read more

Expanded Material Metrology For Refined Etch Selectivities
By Anoop Somanchi - 08 Jun, 2021 - Comments: 0

Trends in advanced device fabrication require combined lithography-etching multi-patterning sequences and self-aligned multi-patterning to form devices’ finest features at subwavelength dimensions. As EUV lithography (13.5 nm) progresses to larger numerical apertures and new thin resists, new multipatterning sequences must be developed with mutually compatible resists and proximal layers t... » read more

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