Power/Performance Bits: July 3


Transient electronics Researchers at Vanderbilt University took a new approach to transient electronics, creating circuits that, rather than requiring active behavior to destruct, will dissolve if not kept above a certain temperature. Using silver nanowires embedded in a polymer that dissolves in water below 32 degrees Celsius – between body and room temperature – the team made a simple... » read more

Accuracy In Optical Overlay Metrology


By Barak Bringoltz, Tal Marciano, Tal Yaziv, Yaron DeLeeuw, Dana Klein, Yoel Feler, Ido Adam, Evgeni Gurevich, Noga Sella, Ze’ev Lindenfeld, Tom Leviant, Lilach Saltoun, Eltsafon Ashwal, Dror Alumot and Yuval Lamhot, Xindong Gao, James Manka, Bryan Chen, and Mark Wagner. Abstract In this paper we discuss the mechanism by which process variations determine the overlay accuracy of optical m... » read more