Carrier Mapping in Sub-2nm Node NSFETs with SSRM (imec, KU Leuven)


Researchers from imec and KU Leuven published "Carrier Mapping in Sub-2nm Node Nanosheet Transistors with Scanning Spreading Resistance Microscopy." Abstract "As the semiconductor industry transitions to gate-all-around architectures such as Nanosheet-FETs (NSFETs) for the 2nm node and beyond, controlling parasitic resistance through precise junction engineering is fundamental. This requi... » read more