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A Study Of Wiggling AA Modeling And Its Impact On Device Performance In Advanced DRAM


In this paper, a wiggling active area (fin) in an advanced 1x DRAM process was analyzed and modeled using the pattern-dependent etch simulation capabilities of the SEMulator3D semiconductor modeling software. Nonuniformity in sidewall passivation caused by hard mask pattern density loading was identified as the root cause of the wiggling profile. The calibrated model mimicked these phenomena, g... » read more

Is It Time To Decentralize The Supply Chain?


One of the key requirements in any engineered system is a backup plan. A single point of failure in safety-critical or mission-critical applications can lead to disaster, whether that involves a smart phone, a car, a bridge, an airplane, or a design, manufacturing or business process. So why has this been largely ignored across the semiconductor manufacturing supply chain? The answer is comp... » read more