Amid record sales for the fourth quarter, Cymer Inc. disclosed that it has delayed the shipment of its 20 Watt extreme ultraviolet (EUV) power source upgrade unit by nearly a quarter.
The company also remains under pressure to deliver a separate 100 Watt power source for EUV by mid-year. The main EUV tool vendor — ASML Holding NV — expects to ship its NXE:3300B, a full-blown, 13.5nm EU...
» read more