Cymer’s EUV Power Source Roadmap Slips


Amid record sales for the fourth quarter, Cymer Inc. disclosed that it has delayed the shipment of its 20 Watt extreme ultraviolet (EUV) power source upgrade unit by nearly a quarter. The company also remains under pressure to deliver a separate 100 Watt power source for EUV by mid-year. The main EUV tool vendor — ASML Holding NV — expects to ship its NXE:3300B, a full-blown, 13.5nm EU... » read more

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