Optimal Surface Condition For Improved Cu-to-Cu Direct Bonding (NCHU, Osaka Univ.)


A new technical paper titled "Hybrid surface pre-treatments for enhancing copper-to-copper direct bonding" was published by researchers at National Chung Hsing University (NCHU) and Osaka University. Abstract excerpt "Three-dimensional integrated circuits (3D IC) require low-temperature, high-reliability Cu–Cu direct bonding to support fine-pitch vertical interconnects and heterogeneous... » read more