Device Overlay Method For High-Volume Manufacturing

By Honggoo Lee, Sangjun Hana and Youngsik Kima of SK Hynix; Myoungsoo Kim, of the Department of Semiconductor System Engineering at Korea University; Hoyoung Heo, Sanghuck Jeon and DongSub Choi, KLA-Tencor Korea; and Jeremy Nabeth, Irina Brinster, Bill Pierson, and John C. Robinson of KLA-Tencor. Abstract Advancing technology nodes with smaller process margins require improved photolithogra... » read more

Power/Performance Bits: Sept. 29

Optical rectenna Engineers at the Georgia Institute of Technology demonstrated the first optical rectenna, a device that combines the functions of an antenna and a rectifier diode to convert light directly into DC current. Based on multiwall carbon nanotubes and tiny rectifiers fabricated onto them, the optical rectennas could provide a new technology for photodetectors that would operate... » read more

Power/Performance Bits: July 28

Synthesizing graphene on silicon Researchers from Korea University, in Seoul, developed an easy and microelectronics-compatible method to grow graphene and have successfully synthesized wafer-scale (four inches in diameter), high-quality, multi-layer graphene on silicon substrates. The method is based on an ion implantation technique, a process in which ions are accelerated under an electric... » read more