Preventive maintenance (PM) automation as a foundational enabler for autonomous semiconductor manufacturing.
The semiconductor industry is entering a critical transition phase toward Autonomous Semiconductor Fabs, driven by escalating process complexity, increasing equipment costs, and heightened demands for operational stability. In this environment, preventive maintenance (PM) is no longer a peripheral operational function but a central determinant of equipment availability, productivity, and manufacturing resilience. As fabs scale and processes advance, reliance on labor-intensive, experience-based maintenance practices is becoming increasingly unsustainable. This white paper examines PM automation as a foundational enabler for autonomous semiconductor manufacturing. Based on an industry-wide survey conducted in 2025, complemented by in-depth interviews and technical trend analysis, the study captures both the industry’s strong consensus on the necessity of PM automation and the structural challenges that continue to limit its large-scale adoption. Rather than focusing solely on individual technologies, this paper addresses PM automation as a system-level transformation requiring coordination across equipment design, data infrastructure, robotics, logistics, and standardization frameworks.
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