Backside Power Delivery Creates Fab Tool, Thermal Dissipation Barriers


Key Takeaways Backside power delivery reduces routing congestion at the most advanced nodes and offers significant performance improvement options. But it also adds a bunch of new challenges involving via alignment and interconnects. Still, leading-edge foundries are making progress, and all of them plan to offer BPDNs at 2nm and below. Backside power delivery networks deliv... » read more

Wafer Warpage Evolution During Key Backside Power Delivery Network Fabrication Steps (Korea Univ., Georgia Tech)


A new technical paper titled "Process-Induced Warpage Behavior in Backside Power Delivery Network Fabrication" was published by researchers at Korea University and Georgia Institute of Technology. Abstract "As semiconductor devices continue to scale, backside power delivery networks (BSPDNs) have emerged as a promising alternative to conventional front-side power delivery networks (FSPDNs),... » read more

The Other Side Of The Wafer: Transistor Channel Stress In Backside Power Delivery Networks


As transistor scaling has moved to the angstrom era (18A, 14A, etc.), the issues of interconnect resistance (IR), IR drop, and power loss are becoming more severe. Traditionally, signal lines and power lines are fabricated on the same side of the wafer as the active device. But fabricating everything on one side of the wafer can create a shortage of space and resources at the interconnect la... » read more