Litho Patterning of Conformal Thin-Film Coatings on Complex 3D Structures (KTH Royal)


Researchers at KTH Royal Institute of Technology published a technical paper titled “Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.” Abstract Excerpt: “Here we present a robust approach for patterning of conformal thin-film coatings on complex 3D structures.” “It is agnostic to the used thin-film deposition process and en... » read more