EUV Lithography: Results of Single Particle Volume Charging Processes in EUV Exposure Environment With Focus On Afterglow Effects


A new technical paper titled "Particle charging during pulsed EUV exposures with afterglow effect" was published by researchers at ASML, ISTEQ B.V., and Eindhoven University of Technology. Abstract "The nanoparticle charging processes along with background spatial-temporal plasma profile have been investigated with 3DPIC simulation in a pulsed EUV exposure environment. It is found that the ... » read more

System Bits: Jan. 9


Microspectrometer smartens up smartphones Thanks to researchers at TU Eindhoven, smartphones are about to get much smarter to do things like checking how clean the air is, whether food is fresh or a lump is malignant thanks to a spectrometer that is so small it can be incorporated easily and cheaply in a mobile phone. The little sensor developed at TU Eindhoven is just as precise as the no... » read more