Deep Learning (DL) Applications In Photomask To Wafer Semiconductor Manufacturing

A list of artificial intelligence used in semiconductor manufacturing tools from February 2023.


Published by the eBeam Initiative Member Companies (February 2023), this list of artificial intelligence (AI) systems used by member companies in their semiconductor manufacturing products shows progress. New examples of systems using AI include:

  • image processing and parameter tuning in lithography tool
  • mask metrology system
  • B-SPline Control Point generation tool
  • semiconductor wafer metrology and inspection system

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