Considerations For The Introduction of New EUV Resist Materials To A Fab (KU Leuven, imec)


A new technical paper titled "Process and materials compatibility considerations for introducing novel extreme ultraviolet resists in a fab: a guide for academia and entrepreneurs" was published by researchers at KU Leuven and imec. Abstract Excerpt "Despite having novel ideas, most researchers struggle to introduce their resist into an advanced fab, i.e., a facility where all the industr... » read more

Layering Protocol Verification


Layering protocols are modeled using layering structures that mirror the protocol layers. There are significant challenges in modelling verification components for layering protocols such as (1) reuse, (2) scalability, (3) controllability, and (4)observability. Furthermore, there may be requirements for complex test scenarios where a great deal of interaction is required between test sequence e... » read more