Extreme ultraviolet (EUV) lithography is at a critical juncture.
After several delays and glitches, [gettech id="31045" comment="EUV"] is now targeted for 7nm and/or 5nm. But there are still a number of technologies that must come together before EUV is inserted into mass production. And if the pieces don’t fall into place, EUV could slip again.
First, the EUV source must generate more ...
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