New Wafer-Like And Reticle-Like Sensors Deliver Fast, Easy Measurements Inside The Process Chamber


Setup and maintenance operations for semiconductor manufacturing tools can be tedious, time-consuming, and expensive, incurring both direct costs for personnel and resources and indirect costs for lost tool time during extended commissioning of new tools and requalification of repaired or serviced tools. Wafer-like (and reticle-like) sensors (WaferSense® from CyberOptics) provide fast, easy ac... » read more

Measurement Of Deep Trenches To Study The RIE Lag Effect


The demand for accurate characterization of high aspect ratio geometries such as narrow gaps, deep trenches or deep holes arises in many technologies and industries. A variety of metrology techniques have been utilized to accommodate these needs. Among the candidates for this type of metrology, 3D optical profiling characterization is becoming more and more prevalent in process control. Due to ... » read more

Accurate Error Bit Mode Analysis Of STT-MRAM Chip With A Novel Current Measurement Module


Authors: (Advantest) Ryo Tamura, Ibuki Mori Naoyoshi Watanabe; (Tohoku University) Hiroki Koike, Tetsuo Endoh. A novel memory test system is needed for future STT-MRAM mass production that supports error bit analysis and its mode categorization on STT-MRAM chip measurement, as STTMRAM cell’s switching is a probabilistic phenomenon based on quantum mechanics. In order to meet this requireme... » read more

Clean Focus, Dose And CD Metrology For CD Uniformity Improvement


Authors: Honggoo Leea, Sangjun Hana, Minhyung Honga, Seungyong Kima, Jieun Leea, DongYoung Leea, Eungryong Oha, Ahlin Choia, Nakyoon Kimb, John C. Robinsonc, Markus Mengelc, Pablo Rovirac, Sungchul Yooc, Raphael Getinc, Dongsub Choib, Sanghuck Jeonb aSK Hynix, 2091, Gyeongchung-daero, Bubal-eub, Icheon-si, Gyeonggi-do, 467-701, Korea bKLA-Tencor Korea, Starplaza bldg., 53 Metapolis-ro, Hwasung... » read more

NIWeek on Offer in May


National Instruments is putting on its annual NIWeek conference and exhibition this month, May 21-24 at the Austin Convention Center in the capital of Texas. Details on the agenda and the full four-day program are available here. I’ve attended NIWeek for the past two years, and it’s an opportunity to learn new things, see impressive product demonstrations, and hear about developments ... » read more

Test at “West”


As you wander through the North Hall of Moscone Center this week, you may notice that some of the big names in automated test equipment are not on the SEMICON West show floor this year. Advantest America has a booth, but the same cannot be said of Teradyne or Xcerra. Some of the bigger names in test and measurement instruments won’t be found exhibiting at SEMICON West, either – such as Keys... » read more

Leasing and Rental in T&M


Buying a high-end oscilloscope or a brand-new logic analyzer may be a tall order financially for small companies. In such cases, leasing or renting an expensive test instrument can be an affordable alternative. Having reliable test and measurement equipment is vital to product development in electronics. National Instruments has built a billion-dollar business on offering instrument hardware... » read more