The fundamental mechanism for radiation damage in semiconductor devices, and methods for reducing dose during X-ray inspection.
X-ray imaging of semiconductor and electronic devices is an invaluable tool; enabling non-invasive sub-surface inspection, identification of defects and measurement of critical dimensions. Figure 1 shows a schematic and description of a typical X-ray inspection system for electronics and semiconductor devices. Unfortunately, semiconductor devices are sensitive to sustained radiation dose, which if too high, can cause current leakage, damage, and ultimately failure of the component or device. This overview paper describes the fundamental mechanism for radiation damage in semiconductor devices; typical dose tolerance limits of electronics; how to measure and model radiation dose levels; and methods for reducing dose during X-ray inspection.
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Fig.1: Schematic of a typical electronics X-ray inspection system. Source: Nordson
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