tag: EUV

DSA: High Stakes Game Of Alphabet Soup
By Ed Sperling - 20 Sep, 2012 - Comments: 0

By Mark LaPedus Directed self-assembly (DSA) is making progress for potential use in semiconductor production, but the industry must make some major advances in a sometimes forgotten and unsung segment—materials. DSA is a complementary patterning technology that makes use of block copolymer materials to enable fine pitches in chip designs. But today’s block copolymers based on poly (MMA... » read more

There’s More To EUV Than Source Power
By Katherine Derbyshire - 20 Sep, 2012 - Comments: 0

By Katherine Derbyshire For some time now, most industry coverage of EUV lithography has focused on the light source. As my colleagues have pointed out, source power limitations impose major constraints on not only potential EUV-based device manufacturing, but even on development of sub-20nm devices and process technologies. When throughput is in the neighborhood of four wafers per hour, lear... » read more

Who Owns What And Why
By Ed Sperling - 23 Aug, 2012 - Comments: 0

Who’s calling the shots these days—and how long they’ll continue calling the shots—is turning out to be as much conjecture as playing the futures exchange. There are so many changes underway that even engineers are crossing boundaries no one ever expected and ending up in companies outside of IC design or moving from seemingly far afield into the design world. Still, there are some c... » read more

Experts At The Table: Challenges At 20nm
By Ed Sperling - 17 Aug, 2012 - Comments: 0

By Ed Sperling Low-Power/High-Performance Engineering sat down to discuss the challenges at 20nm and beyond with Jean-Pierre Geronimi, special projects director at STMicroelectronics; Pete McCrorie, director of product marketing for silicon realization at Cadence; Carey Robertson, director of product marketing at Mentor Graphics; and Isadore Katz, president and CEO of CLK Design Automation. Wh... » read more

Experts At The Table: Challenges At 20nm
By Ed Sperling - 17 Aug, 2012 - Comments: 0

By Ed Sperling Low-Power/High-Performance Engineering sat down to discuss the challenges at 20nm and beyond with Jean-Pierre Geronimi, special projects director at STMicroelectronics; Pete McCrorie, director of product marketing for silicon realization at Cadence; Carey Robertson, director of product marketing at Mentor Graphics; and Isadore Katz, president and CEO of CLK Design Automation. Wh... » read more

Ivy Bridge Settles Old Bet
By Marc David Levenson - 16 Aug, 2012 - Comments: 0

Think back seven years to 2005. Those were boom times with the housing market rising, the dollar high, 65nm node chips on the horizon and EUV the great future lithography hope. EUVL was late for the next (45nm) node, but a great new idea had appeared to fill the gap—water immersion scanning with 193nm exposure! But how far could wet 193nm lithography go before EUVL or some new thing, such as ... » read more

Double Patterning: Challenges And Possible Solutions In Parasitics Extraction
By David Abercrombie - 16 Aug, 2012 - Comments: 0

By Dusan Petranovic and David Abercrombie Double patterning (DP), as the simplest form of multi-patterning techniques, is receiving lots of attention right now. The need for double patterning techniques is driven by the physical limits of the dimensions that can be resolved with current light sources and lenses, as well as by the difficulties and delays in deploying next-generation lithography... » read more

Litho Community Meets And Votes
By Marc David Levenson - 31 Jul, 2012 - Comments: 0

Every 18 months or so, the leading lithography lights of the IEEE meet in an off-the-record workshop to discuss the state and future of our craft. This year’s event took place amid the restored colonial splendor of Williamsburg Virginia in June. Co-chairs Mordechai Rothschild and Lars Liebmann assembled a technical program that covered not only lithography for semiconductor manufacturing, but... » read more

DSA Moves To R&D Pilot Lines
By Ed Sperling - 31 Jul, 2012 - Comments: 0

By Mark LaPedus Directed self-assembly (DSA), an alternative lithography technology that makes use of block copolymers, is still in the R&D stage for semiconductor production. But as the exotic patterning technology continues to make astounding progress, there are signs the IC industry is accelerating its efforts to bring DSA from the lab to the fab. In fact, DSA suddenly has become a ... » read more

Investment Options
By Ed Sperling - 31 Jul, 2012 - Comments: 0

It's clear that something fundamental has changed in the semiconductor manufacturing industry. What's less clear is how this will play out over the long term. Intel's agreement to invest more than $4 billion in ASML to ensure the continued development of EUV and 450mm wafer technology is more than just a one-off deal. It's a very public recognition that the astronomical cost of design and ma... » read more

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